AMAT Centura 5200 Etch
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- CH-A: IPS
- CH-C: eMAX, oxide etch chamber
- CH-D: eMXP+, enhanced MXP+ oxide etch chamber
- CH-F: remote orientor/center finder
- Mainframe: Centura mainframe
- Gas panel: Centura gas panel with Seriplex control
- Narrow body tilt-out loadlocks
- Remote frame, Centura VME rack with turbo controllers and Centura
- Four vacuum pumps: CH-C, CH-D, loadlock, and X-fer chamber
- Neslab HX-150 chiller for CH-D wall, Neslab HX-150 chiller for CHD
- BEA Aerospace chiller for CH-C wall and cathode