BTI Horizontal Oxidation Furnace BDF-4
Two BTI BDF-4 four-stack oxidation/diffusion furnaces configured
for processing up to 6" wafers..
One furnace is right-handed (loading from right to left) and one is
Both furnaces are in good condition and come with spares.
Furnaces can be sold as is or can be refurbished, installed, and
warranteed, if needed.
Gas flow configurations available upon request.