VCR Group IBS TM200S Ion Beam Sputterer
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VCR Group IBS TM200S ion beam sputtering system is useful for SEM
and TEM sample preparation. The IBS/TM200 Ion beam sputter-coating
device is equipped with a 200 l/s turbo-molecular pump, an ion-beam
gun, a quartz crystal thickness monitor, a four-position target carrier, and
a liquid nitrogen cold trap.
System specifications:
Electrical:
Mechanical:
Utilities:
and TEM sample preparation. The IBS/TM200 Ion beam sputter-coating
device is equipped with a 200 l/s turbo-molecular pump, an ion-beam
gun, a quartz crystal thickness monitor, a four-position target carrier, and
a liquid nitrogen cold trap.
System specifications:
Electrical:
- Interlocked to prevent high voltage shock
- 110 V AC, 50/ 60 Hz, 15 A
- 220 V AC, 50/ 60 Hz, 10 A (Optional)
Mechanical:
- Weight: < 500 lbs
- Size: Approximate overall dimensions
- 50” H x 24” W x 32” D (chamber lid open)
- 40” H x 24” W x 32” D (chamber lid closed)
Utilities:
- Argon Gas Flow: 5-10 psi, 1.5 sccm, 99.999 % pure
- Nitrogen Gas Flow: Turbomolecular Pump bleed
- Water Flow: 30 GPH, clean water