VCR Group IBS TM200S Ion Beam Sputterer
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Download VCR Group IBS TM200S Specs
VCR Group IBS TM200S ion beam sputtering system is useful for SEM
and TEM sample preparation.  The IBS/TM200 Ion beam sputter-coating
device is equipped with a 200 l/s turbo-molecular pump, an ion-beam
gun, a quartz crystal thickness monitor, a four-position target carrier, and
a liquid nitrogen cold trap.

System specifications:

Electrical:
  •  Interlocked to prevent high voltage shock
  • 110 V AC, 50/ 60 Hz, 15 A
  • 220 V AC, 50/ 60 Hz, 10 A (Optional)

Mechanical:
  • Weight: < 500 lbs
  • Size: Approximate overall dimensions
  • 50” H x 24” W x 32” D (chamber lid open)
  • 40” H x 24” W x 32” D (chamber lid closed)

Utilities:
  • Argon Gas Flow: 5-10 psi, 1.5 sccm, 99.999 % pure
  • Nitrogen Gas Flow: Turbomolecular Pump bleed
  • Water Flow: 30 GPH, clean water