Karl Suss MA24 Mask Aligner
Download System Specs
Karl Suss MA24 mask aligner configured for
simultaneous double side exposure and cassette to
cassette handling of 4" wafers.

Tool is equipped with diffraction reducing optical
systems and 350W HBO lamps.

Tool features choice of bright field and dark field
illumination, an alignment accuracy between upper
and lower side of the wafer of <2 microns, and
alignment table rotation of <2 degrees.
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