LAM Research TCP 9400 SE
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- Model 9408; Serial # 4055; Vintage 1996
- Wafer size 8" with cassette to cassette transport
- Envision Software version 1.4
- Used for Polysi/Polycide etch and shallow trench isolation
- Ceramic free chamber with waferless auto clean (WAC)
- Single chamber stand-alone version
- Leybold TURBOVAC 1000C turbo-molecular vacuum pump
- Inductively coupled source (TCP)