LAM Research TCP 9400 SE
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  • Model 9408; Serial # 4055; Vintage 1996

  • Rainbow platform

  • Wafer size 8" with cassette to cassette transport

  • Envision Software version 1.4

  • Used for Polysi/Polycide etch and shallow trench  isolation

  • Ceramic free chamber with waferless auto clean (WAC)

  • Single chamber stand-alone version

  • Leybold TURBOVAC 1000C turbo-molecular vacuum pump

  • Inductively coupled source (TCP)

  • 9400 ESC

  • CE Certified  
         
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