UNIT, BROOKS, LINTEC, ASM, TYLAN, STEC, MKS, MATHESON MASS FLOW
CONTROLLERS
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BRAND                MODEL NUMBER        FLOW RATE                GAS
                       
UNIT                        UFC-1100                 100 SCCM                     H2
UNIT                        UFC-1100                       5 SLM                      O2
UNIT                        UFC-1000                       1 SLM                      H2
UNIT                        UFC-1100                     10 SLM                      H2
UNIT                        UFC-1100                 600 SCCM                    NF3
UNIT                        UFC-1000                 200 SCCM                 SiH2Cl2
UNIT                        UFC-1100                 200 SCCM                     Ar
UNIT                        UFC-1100                       1 SLM                      N2
UNIT                        UFC-1100                       1 SLM                      H2
UNIT                        UFC-1260A                     5 SLM                     N2O
UNIT                        UFC-1199                     10 SLM                      Ar
UNIT                        UFC-1020                 200 SCCM                 SiH2Cl2
UNIT                        UFC-1100                 200 SCCM                 SiH2Cl2
UNIT                        UFC-1300                      10 SLM                     N2
UNIT                        UFC-1100                      10 SLM                     N2
UNIT                        UFC-1100                   50 SCCM                     H2
UNIT                        UFC-1100                       1 SLM                      H2
UNIT                        UFC-1100                       1 SLM                      H2
                       
BROOKS                    5850E                     20 SCCM                      N2
                                
LINTEC                      MC-100                  200 SCCM                 SiH2Cl2
                       
ASM                        AFC-260                         1 SLM                      N2
ASM                        AFC-260                         1 SLM                      N2
ASM                        AFC-260                   100 SCCM                     O2
                       
TYLAN                     FM-361                         10 SLM                     N2
                       
STEC                 SEC-4400RC                   20 SCCM                    N2
STEC                 SEC-4400RC                   50 SCCM                   SF6
STEC                 SEC-4400RC                 100 SCCM                  C2F6

MKS                1159B-00500RV               500 SCCM                    N2
MKS                1179A51CS1BV                 50 SCCM                    N2
MKS                1179A11CS1BV                 10 SCCM                    N2
                          
MATHESON               8141                            3 SLM                    NH3
MATHESON               8141                      300 SCCM                    N2