Rudolph Research AutoEL Ellipsometer
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- Operating wavelength: 632.8nm
- Max sample size: 6" x 6"
- Resolution & accuracy:
- Polarizer or analyzer: 0.05°
- Delta: 0.1°
- PSI: 0.05°
- Measuring time:
- Single film: 15 seconds
- Double film: 20 seconds
