Rudolph Research AutoEL Ellipsometer
Click Photos to Enlarge

  • Operating wavelength: 632.8nm
  • Max sample size: 6" x 6"
  • Resolution & accuracy:
  • Polarizer or analyzer: 0.05°
  • Delta: 0.1°
  • PSI: 0.05°
  • Measuring time:
  • Single film: 15 seconds
  • Double film: 20 seconds