Technics Micro Stripper Series 220 Plasma System
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Tehcnics Micro Stripper Series 220 Specs
Technics Micro Stripper Series 220 Plasma System is a low temperature plasma
etcher used for photoresist stripping. Unit includes and features the following:

  • Vacuum pump
  • Dual gas introduction system
  • Stainless steel reactor
  • 500W,13.56 MHz RF generator
  • Process timer
  • Digital readout on all process parameters and functions
  • Stainless steel wafer boat that accomodates 3" to 6" wafers