Thermco Model 4504 Four Stack LPCVD Reactor configured for PolySi, Silicon
Nitride, SiO2/PSG/BPSG, and TEOS/PTEOS/BPTEOS. System is complete
and in excellent working condition. System is capable of processing wafers
up to 6" in diameter. System is equipped with all SiC paddles and TMX 9000

For video presentations of the system in operation copy and paste on your
browser the links below: (Preview) (Preview) (Preview)
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Download Thermco 4504 LPCVD Reactor Specs
Thermco 4504 LPCVD Reactor