Zygo Laser Interferometer
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Zygo Interferometer Specs:

  • Weight: 170 lb (77 kg)
  • Measurement Technique:Phase shifting interferometry
  • Laser: Type: frequency stabilized Helium-Neon laser with fiber
    optic output
  • Wavelength: 1550 nanometers
  • Maximum Output Power: <1 milliwatt
  • Output Power at Instrument Aperture: ≤1 milliwatt
  • Test Beam Diameter: 3 mm
  • Coherence Length: ≥10 meters

Objectives:
  • Mounting: Dovetail
  • Type: Infinity Corrected SLWD Mag. N.A. Working Dist.
  • 50X 0.45(1) 13.80 mm
  • 100X 0.73 4.70 mm
  • (1) 0.38 NA useable

Z-Drive (Focus) Stage:
  • Motor: DC brushless, microstepper
  • Drive: leadscrew
  • Range: 6 in. (152 mm)
  • Resolution: 4 μin. (0.1 μm)
  • X/Y Stage:
  • Motor: DC brushless, microstepper
  • Drive: leadscrew
  • Range: 6 in. (152 mm)
  • Resolution: 4 μin. (0.1 μm)
  • Maximum Velocity: 0.50 in/sec (12.7 mm/sec)

Sample Viewing:
  • Camera Size: 640 x 480 pixels maximum
  • Viewing: 9 in. monochrome video monitorand MetroPro on-screen
    display
  • Focus: manual or automatic

Test Part Characteristics:
  • Type: nominally spherical surfaces (using obective) and flat
    surfaces(without objective)
  • Radius of Curvature: from 100 μm to 3 mm
  • Reflectivity: 4 to 100 %
  • Utility Requirements:
  • Electrical: 90 – 250 VAC, 50/60 Hz (for laser power supply, motor
    driver assembly,video monitor, and computer)
  • The MicroLUPI receives +12 VDC from Zygo Controller Board
    installed in the computer.
  • Compressed Air (for Vibration Isolation Table):60 psi minimum,
    with 1/4 in. input

Operating Environment:
  • Temperature: 15° to 30°C (59° to 86° F)
  • Rate of Temperature Change: <1.0°C/15 min.
  • Humidity: 5 to 95% relative, noncondensing
  • Vibration: Frequency Isolation 1Hz < freq < 120Hz

Compliance:
DHHS Laser Safety Classification: Class II laser
product conforming to NCDRH regulations.


Click Here to Download Zygo Interferometer Manual