AMAT AME 8100 Plasma Etcher
Click Photos to Enlarge
AMAT AME 8100 Plasma Etcher used for reactive ion
etching of oxides, nitrides, and resist descum. System is
configured to process, 4", 5", or 6" wafers. System is
complete and in excellent operating condition. System
comes with multitude of spare parts.
etching of oxides, nitrides, and resist descum. System is
configured to process, 4", 5", or 6" wafers. System is
complete and in excellent operating condition. System
comes with multitude of spare parts.
