Lithography & Photoresist
Lithography
Photoresis
t
Brewer Science CEE 4000 Wafer Track
FAS MicroE
-
200 Extrusion Coat
ing System
GCA XLS 7800 DUV Steppe
r
JEOL JBX-9300FS Electron Beam
Lithography System
Karl Suss MA24 Mask
Aligner
Karl Suss MA25 Mask Aligner
Karl Suss MA56 Mask Aligner
SVGL MICRASCAN MPT
193nm
Scanner
